Veeco unveils new Ion Beam Deposition System

By Editor


Veeco unveils new Ion Beam Deposition System

Greentech Lead America: Veeco, a manufacturer of
optoelectronics, LEDs, solar cells, hard disk drives and other devices, has
introduced the SPECTOR-HT Ion Beam Deposition (IBD) System.

Veeco said its SPECTOR-HT Ion Beam Deposition System
achieves unprecedented levels of productivity by offering the highest
throughput for precision optical thin films. 

Used to create thin film coatings for the optical market,
the SPECTOR-HT provides up to 400 percent increase in throughput, 300 percent
increase in target utilization and 50 percent improvement in material
uniformity compared to previous SPECTOR generations.

The new system offers exceptional film quality, and a
cost-effective manufacturing platform for a variety of optical applications,
including precision optics, lasers, life sciences, biomedical devices, and

The company claims that SPECTOR-HT is the industry’s
first fully automated ion beam deposition system to achieve accelerated
deposition rates at speeds comparable to PVD while maintaining high quality,
optimal films for challenging production requirements. It delivers an increased
deposition rate on lot sizes up to twice as large as those in previous SPECTOR

“With over 200 systems installed worldwide, Veeco is
the recognized industry leader in ion beam deposition coatings for the optical
industry. The new SPECTOR-HT system offers unparalleled throughput advantages,
and a cost-effective platform compared to competing optical deposition
technologies, such as physical vapor deposition (PVD), evaporative coatings or
ion assisted deposition,” said Robert P. Oates, executive vice president, Veeco
Ion Beam Equipment.

Building on Veeco’s proven ion beam deposition
technology, the SPECTOR increases deposition rates, lot sizes, target
utilization and reduces time to process.  SPECTOR-HT achieves ion beam
quality optical films at physical vapor deposition rates.

Recently, Veeco Instruments announced that LED-IT Fusion
Technology Research Center of Korea selected the TurboDisc K465i GaN Metal
Organic Chemical Vapor Deposition system for research and development of high
brightness light emitting diodes, including green LEDs and ultraviolet LEDs.

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